Inspection of microsystems with a laser scanning microscope

Gerd Dussler; B. Broecher; Tilo Pfeifer

doi:10.1117/12.364295

15 September 1999 Inspection of microsystems with a laser scanning microscope

Gerd Dussler, B. Broecher, Tilo Pfeifer

Proceedings Volume 3825, Microsystems Metrology and Inspection; (1999) https://doi.org/10.1117/12.364295
Event: Industrial Lasers and Inspection (EUROPTO Series), 1999, Munich, Germany

Abstract

Hybrid microsystems with optical and mechanical functions can be implemented economically only by an automated assembly. In order to guarantee a high quality of the products, the use of a flexible and simply manageable process control system is necessary. The Laser-Scanning-Microscopy, based on the confocal microscopy, is suitable due to the variable magnification and the threedimensionally visualization ideally for the automated micro-assembly. The confocal Laser-Scanning- Microscope (CLSM) serves in fabrication and also in assembly apart from the process visualization for the analyze for micro surface structures, the detection of defects or the measurement of threedimensional geometries of microparts.

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Gerd Dussler, B. Broecher, and Tilo Pfeifer "Inspection of microsystems with a laser scanning microscope", Proc. SPIE 3825, Microsystems Metrology and Inspection, (15 September 1999); https://doi.org/10.1117/12.364295

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