NanoWalker: a fully autonomous highly integrated miniature robot for nanoscale measurements

Sylvain M. Martel; Peter Geoffrey Madden; Luke Sosnowski; Ian Warwick Hunter; Serge Lafontaine

doi:10.1117/12.364292

15 September 1999 NanoWalker: a fully autonomous highly integrated miniature robot for nanoscale measurements

Sylvain M. Martel, Peter Geoffrey Madden, Luke Sosnowski, Ian Warwick Hunter, Serge Lafontaine

Proceedings Volume 3825, Microsystems Metrology and Inspection; (1999) https://doi.org/10.1117/12.364292
Event: Industrial Lasers and Inspection (EUROPTO Series), 1999, Munich, Germany

Abstract

The aim of this project is to develop the smallest and most sophisticated wireless fully autonomous instrumented robot capable of subatomic movements. The robot named 'NanoWalker' should bring a new paradigm in the way instruments are built while providing a sophisticated platform for a new range of applications. The project involves primarily the investigation of a new legged locomotion based on piezo-actuators with advanced micro-assembly techniques applied to complex embedded electronic systems; the development of new miniature instruments, micro-manipulators, integrated behavior for controlling, searching and scanning at the atomic scale; and the development of a subatomic navigation system. Besides all the new technologies and techniques that we intend to develop and which will be applicable to many areas and systems, the NanoWalker should provide a suitable yet more flexible and powerful platform compared to traditional macro-scaled instruments. It is anticipated that this new form of highly integrated autonomous microsystem will be used as the main building block for a new generation of measurement and inspection systems. In this paper, the main components of the NanoWalker are briefly described.

Citation Download Citation

Sylvain M. Martel, Peter Geoffrey Madden, Luke Sosnowski, Ian Warwick Hunter, and Serge Lafontaine "NanoWalker: a fully autonomous highly integrated miniature robot for nanoscale measurements", Proc. SPIE 3825, Microsystems Metrology and Inspection, (15 September 1999); https://doi.org/10.1117/12.364292

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available