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15 September 1999 NanoWalker: a fully autonomous highly integrated miniature robot for nanoscale measurements
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Proceedings Volume 3825, Microsystems Metrology and Inspection; (1999)
Event: Industrial Lasers and Inspection (EUROPTO Series), 1999, Munich, Germany
The aim of this project is to develop the smallest and most sophisticated wireless fully autonomous instrumented robot capable of subatomic movements. The robot named 'NanoWalker' should bring a new paradigm in the way instruments are built while providing a sophisticated platform for a new range of applications. The project involves primarily the investigation of a new legged locomotion based on piezo-actuators with advanced micro-assembly techniques applied to complex embedded electronic systems; the development of new miniature instruments, micro-manipulators, integrated behavior for controlling, searching and scanning at the atomic scale; and the development of a subatomic navigation system. Besides all the new technologies and techniques that we intend to develop and which will be applicable to many areas and systems, the NanoWalker should provide a suitable yet more flexible and powerful platform compared to traditional macro-scaled instruments. It is anticipated that this new form of highly integrated autonomous microsystem will be used as the main building block for a new generation of measurement and inspection systems. In this paper, the main components of the NanoWalker are briefly described.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sylvain M. Martel, Peter Geoffrey Madden, Luke Sosnowski, Ian Warwick Hunter, and Serge Lafontaine "NanoWalker: a fully autonomous highly integrated miniature robot for nanoscale measurements", Proc. SPIE 3825, Microsystems Metrology and Inspection, (15 September 1999);

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