Mid-IR fiber bundle for remote monitoring and control of chemical processing in a CVD chamber

Ping Lu; Xiaoyi Bao; Thomas K. Whidden

doi:10.1117/12.372810

10 December 1999 Mid-IR fiber bundle for remote monitoring and control of chemical processing in a CVD chamber

Ping Lu, Xiaoyi Bao, Thomas K. Whidden

Proceedings Volume 3849, Infrared Optical Fibers and Their Applications; (1999) https://doi.org/10.1117/12.372810
Event: Photonics East '99, 1999, Boston, MA, United States

Abstract

With the requirements of the remote control outside CVD clean room environment it is recommended to have a FTIR spectrometer separated from the clean room. However to transmit mid-IR light from FTIR to CVD chamber in free space is out of question due to the high loss (absorption of water and CO₂ etc.). Naturally, the mid-IR fiber with the full spectrum transmission range (5000 to 500 cm^-1) will provide the solution. Unfortunately none of the mid-IR fiber can cover such a broad range with low loss, unless a few different kinds of fibers are used together. A mid-IR fiber bundle consisting of two silver halide and six zirconium fluoride fibers was designed and fabricated. The transmission of this bundle shows the broad spectrum coverage of 5000 to 500 cm^-1, which is required for mid-IR FTIR spectrometer in monitoring the gas concentrations in a CVD chamber. The possibility of using this fiber bundle for remote monitoring and control of chemical process in a CVD chamber will be discussed and some experimental results will be presented.

Citation Download Citation

Ping Lu, Xiaoyi Bao, and Thomas K. Whidden "Mid-IR fiber bundle for remote monitoring and control of chemical processing in a CVD chamber", Proc. SPIE 3849, Infrared Optical Fibers and Their Applications, (10 December 1999); https://doi.org/10.1117/12.372810

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