Laser Microchemistry For Direct Writing Of Microstructures

R. M. Osgood Jr.; D. J. Ehrlich; T. F. Deutsch; D. J. Silversmith; A. Sanchez

doi:10.1117/12.934963

9 August 1983 Laser Microchemistry For Direct Writing Of Microstructures

R. M. Osgood Jr., D. J. Ehrlich, T. F. Deutsch, D. J. Silversmith, A. Sanchez

Proceedings Volume 0385, Laser Processing of Semiconductor Devices; (1983) https://doi.org/10.1117/12.934963
Event: 1983 Los Angeles Technical Symposium, 1983, Los Angeles, United States

Abstract

Microscopic laser-initiated chemical reactions can be used to write micrometer-scale features on materials of interest for solid-state electronics. In this paper, we describe the nature of direct-write-type fabrication and summarize the laser techniques which have been developed.

Citation Download Citation

R. M. Osgood Jr., D. J. Ehrlich, T. F. Deutsch, D. J. Silversmith, and A. Sanchez "Laser Microchemistry For Direct Writing Of Microstructures", Proc. SPIE 0385, Laser Processing of Semiconductor Devices, (9 August 1983); https://doi.org/10.1117/12.934963

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