Microhotplate gas sensor arrays

Richard E. Cavicchi; Stephen Semancik; Robin M. Walton; Balaji Panchapakesan; Don L. DeVoe; Maria I. Aquino-Class; James D. Allen; John S. Suehle

doi:10.1117/12.370293

18 November 1999 Microhotplate gas sensor arrays

Richard E. Cavicchi, Stephen Semancik, Robin M. Walton, Balaji Panchapakesan, Don L. DeVoe, Maria I. Aquino-Class, James D. Allen, John S. Suehle

Author Affiliations +

Proceedings Volume 3857, Chemical Microsensors and Applications II; (1999) https://doi.org/10.1117/12.370293
Event: Photonics East '99, 1999, Boston, MA, United States

Abstract

In this work, micromachining and planar processing have been used to produce gas sensing devices with lower power consumption at lower cost. The small size brings new advantages for chemical selectivity as well: multi-element arrays whose time-varying signals can be interpreted using pattern recognition methods. The device platform is a `microhotplate,' consisting of a built-in heater, thermometer, and electrodes to probe the sensing films. Microhotplates are fabricated using CMOS-compatible technologies, enabling on-chip circuitry for multiplexing and signal amplification.

Citation Download Citation

Richard E. Cavicchi, Stephen Semancik, Robin M. Walton, Balaji Panchapakesan, Don L. DeVoe, Maria I. Aquino-Class, James D. Allen, and John S. Suehle "Microhotplate gas sensor arrays", Proc. SPIE 3857, Chemical Microsensors and Applications II, (18 November 1999); https://doi.org/10.1117/12.370293

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