Analysis of fabrication errors for the binary optical resonator of a high-power CO2 laser

Sitao Li; Qiyang Xu; Desheng Xu; Zhixia Guo; Jiaxiong Ye; Ruan Yu; Guoping Zhang

doi:10.1117/12.361174

8 September 1999 Analysis of fabrication errors for the binary optical resonator of a high-power CO₂ laser

Sitao Li, Qiyang Xu, Desheng Xu, Zhixia Guo, Jiaxiong Ye, Ruan Yu, Guoping Zhang

Proceedings Volume 3862, 1999 International Conference on Industrial Lasers; (1999) https://doi.org/10.1117/12.361174
Event: International Symposium on Industrial Lasers, 1999, Wuhan, China

Abstract

A binary optical resonator (BOR) can effectively improve the quality of the output beam. However, the process quality of the binary optical element (BOE) affects the laser beam closely. In this paper, a BOR, whose eigenmode is square- cross-section 10^th order super-Gaussian fundamental beam, with a 16 levels BOE having square aperture, as an example, the fabrication errors such as step width error, etching depth error and mask offset error were discussed. The affect of root mean square (rms) of the output wave relative to desired wave was analyzed. The relationship of rms of output wave relative to step width error, etching depth error and mask offset error were presented respectively. Research shows that the etching depth error has a large affect for the mode distribution in resonator.

Citation Download Citation

Sitao Li, Qiyang Xu, Desheng Xu, Zhixia Guo, Jiaxiong Ye, Ruan Yu, and Guoping Zhang "Analysis of fabrication errors for the binary optical resonator of a high-power CO₂ laser", Proc. SPIE 3862, 1999 International Conference on Industrial Lasers, (8 September 1999); https://doi.org/10.1117/12.361174

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