CANARY: a high-sensitivity ESD test reticle design to evaluate potential risks in wafer fabs

Andreas Englisch; Kees van Hasselt; Michel Tissier; K. C. Wang

doi:10.1117/12.373381

30 December 1999 CANARY: a high-sensitivity ESD test reticle design to evaluate potential risks in wafer fabs

Andreas Englisch, Kees van Hasselt, Michel Tissier, K. C. Wang

Proceedings Volume 3873, 19th Annual Symposium on Photomask Technology; (1999) https://doi.org/10.1117/12.373381
Event: Photomask Technology and Management, 1999, Monterey, CA, United States

Abstract

Electrostatic discharge (ESD) effects on reticles are a well known and dreaded phenomenon in the semiconductor industry. Isolated chrome structures in the scribe lane but also in the device content are susceptible to ESD damage during reticle handling or storage. So far electrical field measurements document the risk by numbers, but what is behind this number? Is it dangerous or just unpleasant? What is about cumulative effects? CANARY is the answer on this. An ESD test reticle with such a high sensitivity that several hundreds of handling cycles, representing reticle lifetimes of several months, can be simulated within a few hours. Customized versions can easily be designed in order to reflect customer specific design and technology requirements.

Citation Download Citation

Andreas Englisch, Kees van Hasselt, Michel Tissier, and K. C. Wang "CANARY: a high-sensitivity ESD test reticle design to evaluate potential risks in wafer fabs", Proc. SPIE 3873, 19th Annual Symposium on Photomask Technology, (30 December 1999); https://doi.org/10.1117/12.373381

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