Author Affiliations +
Khoi A. Phan,1 Chris A. Spence,1 S. Dakshina-Murthy,1 Vidya Bala,1 Alvina M. Williams,2 Steve Strener,3 Richard D. Eandi,3 Junling Li,4 Linard Karklin4
1Advanced Micro Devices, Inc. (United States)
2International Sematech (United States)
3Zygo Corp. (United States)
4Numerical Technologies, Inc. (United States)