Innovations in molding technologies for microfabrication

Tobias Benzler; Volker Piotter; Thomas Hanemann; K. Mueller; Prachai Norajitra; Robert Ruprecht; Juergen H. Hausselt

doi:10.1117/12.361237

30 August 1999 Innovations in molding technologies for microfabrication

Tobias Benzler, Volker Piotter, Thomas Hanemann, K. Mueller, Prachai Norajitra, Robert Ruprecht, Juergen H. Hausselt

Proceedings Volume 3874, Micromachining and Microfabrication Process Technology V; (1999) https://doi.org/10.1117/12.361237
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

Micromolding is a key technology for the economic production of components for microsystems. It is applied in several manufacturing techniques including the LIGA process. Especially MicroInjection Molding allows cost-effective large-scale production of components for many applications to be used in microsystems technology. Using special molding machines, lateral dimensions in the micrometer range, structural details down to 200nm and maximum aspect ratios of more than 20 are achieved. Examples for applications are PSU-made housings for microfluidic systems or microcomponents made of PMMA for cardiac catheters. PC or LCP are appropriate materials for interconnection devices in microoptics and electronics. Other examples are injection molded lost plastic molds for electroforming or electroless plating of metal microstructures. An important economic factor is the optimization of the molding process and tool using different simulation techniques. Recently, novel techniques for manufacturing metal or ceramic microstructures were developed by adapting Powder Injection Molding to microtechnologies. Using commercially available feedstocks, microstructures were made of metals or ceramics. Rapid manufacturing of microcomponents is achieved by the so-called Photomolding process using reactive polymer resins as photocurable material and e.g. mold inserts fabricated by laser ablation. The addition of micro- or nanosized ceramics to the resin allows the molding of filled composite with enhanced mechanical properties. Subsequent debindering and sintering steps yield the pure ceramic microcomponents.

Citation Download Citation

Tobias Benzler, Volker Piotter, Thomas Hanemann, K. Mueller, Prachai Norajitra, Robert Ruprecht, and Juergen H. Hausselt "Innovations in molding technologies for microfabrication", Proc. SPIE 3874, Micromachining and Microfabrication Process Technology V, (30 August 1999); https://doi.org/10.1117/12.361237

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