Characterization of micromachined structures: comparison of measurement and theory

Steven C. Aceto; Adolfo O. Gutierrez; Michelle D. Simkulet; Thomas W. Krawczyk Jr.; Michael Lienhard; Andrew Lundgren; Brandon Houghton; David Patti

doi:10.1117/12.360474

3 September 1999 Characterization of micromachined structures: comparison of measurement and theory

Steven C. Aceto, Adolfo O. Gutierrez, Michelle D. Simkulet, Thomas W. Krawczyk Jr., Michael Lienhard, Andrew Lundgren, Brandon Houghton, David Patti

Author Affiliations +

Proceedings Volume 3875, Materials and Device Characterization in Micromachining II; (1999) https://doi.org/10.1117/12.360474
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

Using the MEMSPEC-2000^TM prototype test station, several micromachined structures have been characterized. The MEMSPEC-2000^TM test station employs a laser based non- contact measurement technique to determine the 3D profile of the test structure. Vertical resolution of 0.1 micron and lateral resolution of approximately 1 micron can be achieved. The bandwidth of the sensor is DC to 100 kHz, allowing for time domain measurements of moving structures to be made. Standard static surface profiles have been measured for a number of varied types of test structures. The results of these measurements will be compared with design values. The time response of activated test structures will also be presented and compared to the theoretical predictions based upon modeling equations.

Citation Download Citation

Steven C. Aceto, Adolfo O. Gutierrez, Michelle D. Simkulet, Thomas W. Krawczyk Jr., Michael Lienhard, Andrew Lundgren, Brandon Houghton, and David Patti "Characterization of micromachined structures: comparison of measurement and theory", Proc. SPIE 3875, Materials and Device Characterization in Micromachining II, (3 September 1999); https://doi.org/10.1117/12.360474

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