Performance analysis of a planar vibrating microgyroscope using a dynamic model with respect to angular rate frequency

Yoonshik Hong; Jong-Hyun Lee; Soo Hyun Kim

doi:10.1117/12.360506

31 August 1999 Performance analysis of a planar vibrating microgyroscope using a dynamic model with respect to angular rate frequency

Yoonshik Hong, Jong-Hyun Lee, Soo Hyun Kim

Author Affiliations +

Proceedings Volume 3876, Micromachined Devices and Components V; (1999) https://doi.org/10.1117/12.360506
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

A dynamic model for a vibrating microgyroscope with respect to angular rate is derived. Using the dynamic model, responses of the vibrating microgyroscope with respect to angular rate input is analyzed. A microgyroscope, which vibrates on the substrate plane, is designed and fabricated by simplified fabrication processes using single polysilicon on insulator structure. The validity of the derived dynamic model is tested by comparing simulation results with and experiments. The performance of the fabricated microgyroscope is investigated in a vacuum chamber of 100 mtorr. The obtained sensitivity of the microgyroscope at a typical static angular rate is 5 mV s/degree.

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Yoonshik Hong, Jong-Hyun Lee, and Soo Hyun Kim "Performance analysis of a planar vibrating microgyroscope using a dynamic model with respect to angular rate frequency", Proc. SPIE 3876, Micromachined Devices and Components V, (31 August 1999); https://doi.org/10.1117/12.360506

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