Dynamic analysis of new micromachined valveless microinjector

Md. Anisur Rahman; Y. Zhao; Thomas H. Gong

doi:10.1117/12.359354

19 August 1999 Dynamic analysis of new micromachined valveless microinjector

Md. Anisur Rahman, Y. Zhao, Thomas H. Gong

Proceedings Volume 3877, Microfluidic Devices and Systems II; (1999) https://doi.org/10.1117/12.359354
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

A novel micro-machined valve-less micro-injector has been demonstrated in the present paper. The micro-injector is designed by thermally bubble driven actuation method that requires no mechanical moving parts for actuation and control of droplets. The use of thermal bubble for actuation provides virtual chamber neck and virtual valves as well. Furthermore it offers simplified fabrication in a single wafer that is compatible with IC fabrication processes.

Citation Download Citation

Md. Anisur Rahman, Y. Zhao, and Thomas H. Gong "Dynamic analysis of new micromachined valveless microinjector", Proc. SPIE 3877, Microfluidic Devices and Systems II, (19 August 1999); https://doi.org/10.1117/12.359354

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