Electrical impedance-spectroscopy particle detector for use in microanalysis systems

Bruce K. Gale; A. Bruno Frazier

doi:10.1117/12.359337

19 August 1999 Electrical impedance-spectroscopy particle detector for use in microanalysis systems

Bruce K. Gale, A. Bruno Frazier

Proceedings Volume 3877, Microfluidic Devices and Systems II; (1999) https://doi.org/10.1117/12.359337
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

This paper describes a novel chromatographic detection method using an integrated electrical impedance spectroscopy particle detector fabricated using micromachining technologies for use in chemical and biological analysis systems such as liquid chromatography or field flow- fractionation systems. The design, theory, fabrication, and testing of the detector are described. Critical parameters of the detector such as detection limits, and the effects of flow rate and applied voltage on detector response are measured. Motivation for use of an on-chip impedance spectroscopy detector is given.

Citation Download Citation

Bruce K. Gale and A. Bruno Frazier "Electrical impedance-spectroscopy particle detector for use in microanalysis systems", Proc. SPIE 3877, Microfluidic Devices and Systems II, (19 August 1999); https://doi.org/10.1117/12.359337

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