Mesoscale electromagnetically actuated normally closed valve realized on LTCC tapes

Mario Gongora-Rubio; Luis Sola-Laguna; Michael A. Smith; Jorge J. Santiago-Aviles

doi:10.1117/12.359341

19 August 1999 Mesoscale electromagnetically actuated normally closed valve realized on LTCC tapes

Mario Gongora-Rubio, Luis Sola-Laguna, Michael A. Smith, Jorge J. Santiago-Aviles

Proceedings Volume 3877, Microfluidic Devices and Systems II; (1999) https://doi.org/10.1117/12.359341
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

Sensors and actuators with promising characteristics in aggressive environments and high temperatures have been developed using low temperature co-fired ceramic tape technology. We would like to report our work on an electro- magnetically actuated normally closed valve.

Citation Download Citation

Mario Gongora-Rubio, Luis Sola-Laguna, Michael A. Smith, and Jorge J. Santiago-Aviles "Mesoscale electromagnetically actuated normally closed valve realized on LTCC tapes", Proc. SPIE 3877, Microfluidic Devices and Systems II, (19 August 1999); https://doi.org/10.1117/12.359341

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