Concept for zero-alignment micro-optical systems

Raviv Levy; Michael R. Descour; Randy J. Shul; Christi Lober Willison; Mial E. Warren; Terho K. Kololuoma; Juha T. Rantala

doi:10.1117/12.360521

31 August 1999 Concept for zero-alignment micro-optical systems

Raviv Levy, Michael R. Descour, Randy J. Shul, Christi Lober Willison, Mial E. Warren, Terho K. Kololuoma, Juha T. Rantala

Author Affiliations +

Proceedings Volume 3879, Micromachine Technology for Diffractive and Holographic Optics; (1999) https://doi.org/10.1117/12.360521
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

In this paper we present the results of the first fabrication and micro-assembly experiments of a silicon- wafer based micro-optical table (MOT). Based on these experiments, estimates of position accuracy are reported. We also report on progress in fabrication of lens elements in a hybrid sol-gel material (HSGM). Diffractive optical elements have been patterned in a 13-micron thick HSGM layer on a 150-micron thick soda-lime glass substrate. The measured rms surface roughness was 20 nm. Finally, we describe modeling of MOT systems using non-sequential ray tracing.

Citation Download Citation

Raviv Levy, Michael R. Descour, Randy J. Shul, Christi Lober Willison, Mial E. Warren, Terho K. Kololuoma, and Juha T. Rantala "Concept for zero-alignment micro-optical systems", Proc. SPIE 3879, Micromachine Technology for Diffractive and Holographic Optics, (31 August 1999); https://doi.org/10.1117/12.360521

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