Fabrication of gratings on sol-gel-derived glass film by means of embossing without baking

Yee Loy Lam; Jian Liu; Gu Tan; Yuen Chuen Chan; Yan Zhou

doi:10.1117/12.360532

31 August 1999 Fabrication of gratings on sol-gel-derived glass film by means of embossing without baking

Yee Loy Lam, Jian Liu, Gu Tan, Yuen Chuen Chan, Yan Zhou

Proceedings Volume 3879, Micromachine Technology for Diffractive and Holographic Optics; (1999) https://doi.org/10.1117/12.360532
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

In this paper, we report our success in the fabrication of optical diffractive gratings by means of direct embossing on sol-gel derived glasses. The sol-gel glass film is derived from composite organic-inorganic material with spin-coating. No baking is required during the whole processing. As a preliminary result, the grating with a period of 1.102 micrometers and a thickness of 57.2 micrometers has been successfully fabricated. Our experiments provide a simple and low temperature approach for fabricating optical gratings useful in integrated optics.

Citation Download Citation

Yee Loy Lam, Jian Liu, Gu Tan, Yuen Chuen Chan, and Yan Zhou "Fabrication of gratings on sol-gel-derived glass film by means of embossing without baking", Proc. SPIE 3879, Micromachine Technology for Diffractive and Holographic Optics, (31 August 1999); https://doi.org/10.1117/12.360532

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