Micro stereo lithography and fabrication of 3D microdevices

Vijay K. Varadan; Vasundara V. Varadan

doi:10.1117/12.360516

31 August 1999 Micro stereo lithography and fabrication of 3D microdevices

Proceedings Volume 3879, Micromachine Technology for Diffractive and Holographic Optics; (1999) https://doi.org/10.1117/12.360516
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

Micro Stereo Lithography (MSL) is a poor man's LIGA for fabricating high aspect ratio MEMS devices in UV curable semiconducting polymers using either two computer-controlled low inertia galvanometric mirrors with the aid of focusing lens or an array of optical fibers. For 3D MEMS devices, the polymers need to have conductive and possibly piezoelectric or ferroelectric properties. Such polymers are being developed at Penn State resulting in microdevices for fluid and drug delivery. Applications may include implanted medical delivery systems, chemical and biological instruments, fluid delivery in engines, pump coolants and refrigerants for local cooling of electronic components. With the invention of organic thin film transistor, now it is possible to fabricate 3D polymeric MEMS devices with built-in-electronics similar to silicon based microelectronics. In this paper, a brief introduction of MSL system is presented followed by a detailed design and development of micro pumps using this approach.

Citation Download Citation

Vijay K. Varadan and Vasundara V. Varadan "Micro stereo lithography and fabrication of 3D microdevices", Proc. SPIE 3879, Micromachine Technology for Diffractive and Holographic Optics, (31 August 1999); https://doi.org/10.1117/12.360516

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