Quasi-continuous mask-coding method for fabricating diffractive optical elements

Liping Zhao; Yee Loy Lam; Yan Zhou

doi:10.1117/12.360515

31 August 1999 Quasi-continuous mask-coding method for fabricating diffractive optical elements

Liping Zhao, Yee Loy Lam, Yan Zhou

Proceedings Volume 3879, Micromachine Technology for Diffractive and Holographic Optics; (1999) https://doi.org/10.1117/12.360515
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

Based on the analysis of the effect of fabrication errors on diffraction efficiency of a diffractive optical element and image quality of a binary optical lens (BOL), a novel quasi- continuous mask-coding (QCMC) method is presented in this paper. This coding method puts forward a series of new mask patterns, making it possible to fabricate quasi-continuous micro profile by using the same number of masks as employed in the traditional `binary' fabrication technology. The QCMC technique breaks through the current convention for coding m masks to get the micro profile with 2^m steps in one zone. This paper presents the theory of the QCMC method and provides examples of practical mask patterns. by using QCMC, BOLs with enhanced diffraction efficiency can be fabricated by traditional multilayer micro fabrication method or by laser writing technology without any additional equipment or processing procedure. Employing this method will enhance the diffraction efficiency, the optical performance, and in particular the image quality of a hybrid optical imaging system.

Citation Download Citation

Liping Zhao, Yee Loy Lam, and Yan Zhou "Quasi-continuous mask-coding method for fabricating diffractive optical elements", Proc. SPIE 3879, Micromachine Technology for Diffractive and Holographic Optics, (31 August 1999); https://doi.org/10.1117/12.360515

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available