MEMS reliability, process monitoring, and quality assurance

Howard R. Last; Bruce W. Dudley; Robert L. Wood

doi:10.1117/12.359363

18 August 1999 MEMS reliability, process monitoring, and quality assurance

Howard R. Last, Bruce W. Dudley, Robert L. Wood

Proceedings Volume 3880, MEMS Reliability for Critical and Space Applications; (1999) https://doi.org/10.1117/12.359363
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

The reliability of a MEMS-based system depends on the producibility and environmental stability of the MEMS components as well as other components within the system. This article will focus on MEMS components in a sacrificial LIGA MEMS-based Safety & Arming (S&A) system. The process monitoring and quality assurance methods under development for LIGA MEMS S&A components are presented. These methods include techniques to study: (1) process bias, (2) material microstructure and mechanical properties, (3) mechanical response of spring-supported structures, and (4) actuator performance. Characterization of the as-produced components and materials serve as the starting point for future studies of reliability of LIGA MEMS components and systems. The utilization of several process monitoring and quality assurance methods in future reliability studies is discussed.

Citation Download Citation

Howard R. Last, Bruce W. Dudley, and Robert L. Wood "MEMS reliability, process monitoring, and quality assurance", Proc. SPIE 3880, MEMS Reliability for Critical and Space Applications, (18 August 1999); https://doi.org/10.1117/12.359363

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