Reliability of microsystems based on a failure mechanism approach

S. Cruzel; Daniel Esteve; Monique Dilhan; Jean-Yves Fourniols; Francis Pressecq; O. Puig; Jean-Jacques Simonne

doi:10.1117/12.359364

18 August 1999 Reliability of microsystems based on a failure mechanism approach

S. Cruzel, Daniel Esteve, Monique Dilhan, Jean-Yves Fourniols, Francis Pressecq, O. Puig, Jean-Jacques Simonne

Proceedings Volume 3880, MEMS Reliability for Critical and Space Applications; (1999) https://doi.org/10.1117/12.359364
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

Compactness, complexity of the interconnections and specific packaging, which are characteristics of Microsystems (MEMS), rule out the use of statistical procedure to assess reliability in space applications. Predictable reliability is the method recommended in this paper that uses a similar approach as CALCE already did for hybrid and microelectronic circuits. This method based on a failure mechanism approach is recalled at first and an example to illustrate this procedure based on the evolution of material crystal properties under radiation is presented.

Citation Download Citation

S. Cruzel, Daniel Esteve, Monique Dilhan, Jean-Yves Fourniols, Francis Pressecq, O. Puig, and Jean-Jacques Simonne "Reliability of microsystems based on a failure mechanism approach", Proc. SPIE 3880, MEMS Reliability for Critical and Space Applications, (18 August 1999); https://doi.org/10.1117/12.359364

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