Online characterization of HSG polysilicon by AFM

Larry M. Ge; M. A. el-Hamdi; Roger Alvis; S. Sawaya; David Gifford; Rafael Lainez; L. Hendrix

doi:10.1117/12.361340

27 August 1999 Online characterization of HSG polysilicon by AFM

Larry M. Ge, M. A. el-Hamdi, Roger Alvis, S. Sawaya, David Gifford, Rafael Lainez, L. Hendrix

Proceedings Volume 3884, In-Line Methods and Monitors for Process and Yield Improvement; (1999) https://doi.org/10.1117/12.361340
Event: Microelectronic Manufacturing '99, 1999, Santa Clara, CA, United States

Abstract

Automated AFM (Atomic Force Microscope) has been used to characterize the structure of the HSG (hemi-spherical grain) polysilicon film. The structure characterization parameters such as the surface roughness, the grain size and density of the storage polysilicon were returned by AFM. In this paper we carried out designed experiments and characterized HSG samples with variant growth temperatures and doping densities. We compare the new AFM technique and the conventional optical reflectivity and SEM techniques. The results show that AFM data has a strong correlation with the electric response of the DRAM devices while the optical reflectivity and SEM measurements show weak or no correlation. Among the many data analysis performed by the AFM software, kurtosis and skewness were found to be valuable parameters for the optimization and control of both capacitance and ONO BV (breakdown voltage) of the DRAM devices.

Citation Download Citation

Larry M. Ge, M. A. el-Hamdi, Roger Alvis, S. Sawaya, David Gifford, Rafael Lainez, and L. Hendrix "Online characterization of HSG polysilicon by AFM", Proc. SPIE 3884, In-Line Methods and Monitors for Process and Yield Improvement, (27 August 1999); https://doi.org/10.1117/12.361340

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available