Direct writing of nickel by electrodeposition from various electrolytes

Greger Thornell; Anders Jansson; Stefan A. I. Johansson

doi:10.1117/12.364480

1 October 1999 Direct writing of nickel by electrodeposition from various electrolytes

Greger Thornell, Anders Jansson, Stefan A. I. Johansson

Proceedings Volume 3892, Device and Process Technologies for MEMS and Microelectronics; (1999) https://doi.org/10.1117/12.364480
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

Direct writing with the help of a sharp microelectrode in close vicinity of a conducting substrate in an aqueous metal salt electrolyte is possible by consistently adjusting the gap between the electrode and the growing structure to maintaining an applied voltage, or the resulting electric field.

Citation Download Citation

Greger Thornell, Anders Jansson, and Stefan A. I. Johansson "Direct writing of nickel by electrodeposition from various electrolytes", Proc. SPIE 3892, Device and Process Technologies for MEMS and Microelectronics, (1 October 1999); https://doi.org/10.1117/12.364480

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