Fabrication of an uncooled infrared sensor using pyroelectric thin film

Yun-Kwon Park; Byeong-Kwon Ju; Heung-Woo Park; Young-Soo Yoon; Sang Seop Yom; Young-Jei Oh; Jung-Ho Park; Sang-Hee Suh; Myung-Hwan Oh; Chul-Ju Kim

doi:10.1117/12.364503

1 October 1999 Fabrication of an uncooled infrared sensor using pyroelectric thin film

Yun-Kwon Park, Byeong-Kwon Ju, Heung-Woo Park, Young-Soo Yoon, Sang Seop Yom, Young-Jei Oh, Jung-Ho Park, Sang-Hee Suh, Myung-Hwan Oh, Chul-Ju Kim

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Proceedings Volume 3892, Device and Process Technologies for MEMS and Microelectronics; (1999) https://doi.org/10.1117/12.364503
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

In conventional IR-sensors, there are problems of needing cooler and sensing wavelength limitation. These problems can be achieved by using un-cooling thermal IR senors. However, they raise the problems of the attack of pyroelectric thin film layer during the etching of sacrificial layer as well as the thermal isolation of the IR detection layer. In order to fabricate uncooled IR-sensor using pyroelectric film, multilayer should be prepared pyroelectric thin film and thermally isolating membrane structure of square-shaped microstructures. We used the direct bonding technique to avoid the thermal loss by silicon substrate and the attack of pyroelectric thin film by etchant of the sacrificial layer. Metallic Pt layer used as a top and a bottom electrodes were deposited by E-beam sputtering method, while pyroelectric thin films were prepared Sol-Gel techniques. Because the pyroelectric thin film with c-axial orientation raised thermal polarization without the polling, the more integrated capability could be achieved. We investigated the characterized of the pyroelectric thin films: P-E loop, dielectric constant, XRD etc.

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Yun-Kwon Park, Byeong-Kwon Ju, Heung-Woo Park, Young-Soo Yoon, Sang Seop Yom, Young-Jei Oh, Jung-Ho Park, Sang-Hee Suh, Myung-Hwan Oh, and Chul-Ju Kim "Fabrication of an uncooled infrared sensor using pyroelectric thin film", Proc. SPIE 3892, Device and Process Technologies for MEMS and Microelectronics, (1 October 1999); https://doi.org/10.1117/12.364503

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KEYWORDS

Silicon

Thin films

Etching

Infrared sensors

Dielectrics

Platinum

Sensors

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