Characteristics of sol-gel-derived (Pb,Ca)TiO3 pyroelectric thin films

Chih-Ming Wang; Ying-Chung Chen; Yao-Te Huang; Ming-Cheng Kao

doi:10.1117/12.370384

12 November 1999 Characteristics of sol-gel-derived (Pb,Ca)TiO₃ pyroelectric thin films

Chih-Ming Wang, Ying-Chung Chen, Yao-Te Huang, Ming-Cheng Kao

Proceedings Volume 3896, Design, Fabrication, and Characterization of Photonic Devices; (1999) https://doi.org/10.1117/12.370384
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore

Abstract

Polycrystalline thin films of Ca-modified lead titanate (PCT) were deposited on Pt/SiO₂/Si substrates using a diol-based sol-gel process. Calcium acetylacetonate hydrate was adopted as a starting material instead of calcium acetate or calcium nitrate tetra-hydrate used in general. By changing the Ca content and heating temperature, the influences of various processing parameters on the characteristics of thin films are studied. With the increase of Ca content, the relative dielectric constant of PCT thin film increases from 43 up to 70 at the heating temperature of 700°C. It was found that the coercive field and the remanent polarization decreased, but the pyroelectric coefficient increased with an increase of Ca content. The results show that PCT thin film exhibits the largest figures of merit for the voltage responsivity and the specific detectivity at heating temperature of 700°C and Ca content of 25 mol%.

Citation Download Citation

Chih-Ming Wang, Ying-Chung Chen, Yao-Te Huang, and Ming-Cheng Kao "Characteristics of sol-gel-derived (Pb,Ca)TiO₃ pyroelectric thin films", Proc. SPIE 3896, Design, Fabrication, and Characterization of Photonic Devices, (12 November 1999); https://doi.org/10.1117/12.370384

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