Separate measurement of geometrical thickness and refractive index by an interference confocal microscope

Takashi Fukano; Ichirou Yamaguchi

doi:10.1117/12.369325

11 November 1999 Separate measurement of geometrical thickness and refractive index by an interference confocal microscope

Takashi Fukano, Ichirou Yamaguchi

Author Affiliations +

Proceedings Volume 3897, Advanced Photonic Sensors and Applications; (1999) https://doi.org/10.1117/12.369325
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore

Abstract

In this paper we first survey non-contacting and separate measurement of thickness and refractive index of a transparent plate or film. Then we describe the separate measurement of refractive index and geometrical index and geometrical thickness of multiple layers which uses a combination of confocal microscopy and low-coherence interferometry. The measurement has been accelerated by replacing the low-coherence interferometry by wavelength- scanning heterodyne interferometry using a laser diode. Finally, accuracy of the measurement has been experimentally studied and display of a cross-sectional image of a stack of glass plates has been demonstrated.

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Takashi Fukano and Ichirou Yamaguchi "Separate measurement of geometrical thickness and refractive index by an interference confocal microscope", Proc. SPIE 3897, Advanced Photonic Sensors and Applications, (11 November 1999); https://doi.org/10.1117/12.369325

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