Common deep level in GaN

Tzu-Chi Wen; Shih-Chang Lee; Wei-I Lee; Jen-Da Guo; Ming Shiann Feng

doi:10.1117/12.369421

9 November 1999 Common deep level in GaN

Tzu-Chi Wen, Shih-Chang Lee, Wei-I Lee, Jen-Da Guo, Ming Shiann Feng

Proceedings Volume 3899, Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures; (1999) https://doi.org/10.1117/12.369421
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore

Abstract

A deep level with the activation energy around 0.45-0.6 eV has persistently appeared in GaN samples grown by hydride vapor-phase epitaxy, organometallic vapor-phase epitaxy and molecular beam epitaxy. However, the origin of this deep level still remains unclear. In this study, we investigated this deep level trap E2 of GaN films by using deep level transient spectroscopy. The GaN films were grown by a conventional low pressure organometallic vapor-phase epitaxy technique with different V/III ratios. Frequency-dependent capacitance measurement was performed to determine the most proper frequency for capacitance measurements. Capacitance- voltage measurements were then applied to obtain the carrier concentrations. The carrier concentration became higher as the flow rate of NH3 got lower. The deep level E2 is found in GaN samples grown with higher V/III ratios. The trap concentration of level E2 increased with increasing NH₃ flow rate. Compared with the theoretical prediction of the nitrogen antisite level in GaN, the level E2 was believed to be related to nitrogen antisites.

Citation Download Citation

Tzu-Chi Wen, Shih-Chang Lee, Wei-I Lee, Jen-Da Guo, and Ming Shiann Feng "Common deep level in GaN", Proc. SPIE 3899, Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures, (9 November 1999); https://doi.org/10.1117/12.369421

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available