Improved silicon micromachined 3D mirror for acceleration sensing using an extrashort external-cavity laser self-mixing interferometer

Franck Alexis Chollet; Ai Qun Liu; Ludi Zheng; Anand Krishna Asundi; LiWie Lin

doi:10.1117/12.369381

9 November 1999 Improved silicon micromachined 3D mirror for acceleration sensing using an extrashort external-cavity laser self-mixing interferometer

Franck Alexis Chollet, Ai Qun Liu, Ludi Zheng, Anand Krishna Asundi, LiWie Lin

Author Affiliations +

Proceedings Volume 3899, Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures; (1999) https://doi.org/10.1117/12.369381
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore

Abstract

We have designed a ne type of folding suspended polysilicon micro-mirror, integrating a new type of precision position- lock, a new compact design for the hinges and a bi- directional electrostatic actuator to bias the position of the mirror. The mirror is intended to be used in a very short external cavity laser configuration for acceleration/displacement sensing. An extensive theory has been built to guide the design and the fabrication of the sensor.

Citation Download Citation

Franck Alexis Chollet, Ai Qun Liu, Ludi Zheng, Anand Krishna Asundi, and LiWie Lin "Improved silicon micromachined 3D mirror for acceleration sensing using an extrashort external-cavity laser self-mixing interferometer", Proc. SPIE 3899, Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures, (9 November 1999); https://doi.org/10.1117/12.369381

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