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3 March 2000 Critical issues on the assessment of laser-induced damage thresholds of fluoride multilayer coatings at 193 nm
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Abstract
Optimization of deposition technologies improves the laser resistivity of fluoride multilayer coatings at wavelengths as short as 193 nm.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Roland Thielsch, Joerg Heber, Norbert Kaiser, Sven Martin, and Eberhard Welsch "Critical issues on the assessment of laser-induced damage thresholds of fluoride multilayer coatings at 193 nm", Proc. SPIE 3902, Laser-Induced Damage in Optical Materials: 1999, (3 March 2000); https://doi.org/10.1117/12.379309
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