Diode-pumped DUV cw all-solid-state laser to replace argon ion lasers

Ekhard Zanger; B. Liu; Wolfgang Gries

doi:10.1117/12.382752

14 April 2000 Diode-pumped DUV cw all-solid-state laser to replace argon ion lasers

Ekhard Zanger, B. Liu, Wolfgang Gries

Proceedings Volume 3929, Solid State Lasers IX; (2000) https://doi.org/10.1117/12.382752
Event: Symposium on High-Power Lasers and Applications, 2000, San Jose, CA, United States

Abstract

The slim series DELTATRAIN^TM--worldwide the first integrated cw diode-pumped all-solid-state DUV laser at 266 nm with a compact, slim design--has been developed. The slim design minimizes the DUV DPSSL footprint and thus greatly facilitates the replacement of commonly used gas ion lasers, including these with intra-cavity frequency doubling, in numerous industrial and scientific applications. Such a replacement will result in an operation cost reduction by several thousands US$DLR each year for one unit. Owing to its unique geometry-invariant frequency doubling cavity- based on the LAS patent-pending DeltaConcept architecture-- this DUV laser provides excellent beam-pointing stability of <2 (mu) rad/ degree(s)C and power stability of <2%. The newest design of the cavity block has adopted a cemented resonator with each component positioned precisely inside a compact monolithic metal block. The automatic and precise crystal shifter ensures long operation lifetime of > 5000 hours of whole 266 nm laser. The microprocessor controlled power supply provides an automatic control of the whole 266 nm laser, making this DUV laser a hands-off system which can meet tough requirements posed by numerous industrial and scientific applications. It will replace the commonplace ion laser as the future DUV laser of choice.

Citation Download Citation

Ekhard Zanger, B. Liu, and Wolfgang Gries "Diode-pumped DUV cw all-solid-state laser to replace argon ion lasers", Proc. SPIE 3929, Solid State Lasers IX, (14 April 2000); https://doi.org/10.1117/12.382752

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