Excimer laser micromachining for fabrication of diamond diffractive optical elements

Vitali I. Konov; V. V. Kononenko; Sergej M. Pimenov; Alexander M. Prokhorov; Vladimir S. Pavelyev; Victor A. Soifer; Peter F. Muys; E. Vandamme

doi:10.1117/12.387570

7 June 2000 Excimer laser micromachining for fabrication of diamond diffractive optical elements

Vitali I. Konov, V. V. Kononenko, Sergej M. Pimenov, Alexander M. Prokhorov, Vladimir S. Pavelyev, Victor A. Soifer, Peter F. Muys, E. Vandamme

Author Affiliations +

Proceedings Volume 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V; (2000) https://doi.org/10.1117/12.387570
Event: Symposium on High-Power Lasers and Applications, 2000, San Jose, CA, United States

Abstract

Results of the development of multilevel diamond diffractive optical elements for high power CO₂ lasers are reported. For this purpose, the technique of selected-area laser ablation was applied to create a given phase microrelief on mechanically polished CVD polycrystalline diamond plates. High precision micromachining of the diamond plates was performed using a KrF excimer-laser-based system. The spherical and cylindrical Fresnel lenses with an aperture up to 6 by 6 mm⁶ were produced and tested with a cw CO₂ laser. The diffraction efficiency of the developed DOE measured in the case of the cylindrical lens was found to be only 1-2 percent lower than the theoretical value. Also a diffractive shaper transforming a Gaussian beam of a CO₂ laser into a uniformly filled-in rectangle was designed and fabricated.

Citation Download Citation

Vitali I. Konov, V. V. Kononenko, Sergej M. Pimenov, Alexander M. Prokhorov, Vladimir S. Pavelyev, Victor A. Soifer, Peter F. Muys, and E. Vandamme "Excimer laser micromachining for fabrication of diamond diffractive optical elements", Proc. SPIE 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, (7 June 2000); https://doi.org/10.1117/12.387570

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available