Selectively deposited copper on laser-treated polyimide using electroless plating

Gang Zhao; Harvey M. Phillips; HongYu Zheng; Siu Chung Tam; Wen Qing Liu; Gongling Wen; Zhiben Gong; Yee Loy Lam

doi:10.1117/12.387591

7 June 2000 Selectively deposited copper on laser-treated polyimide using electroless plating

Gang Zhao, Harvey M. Phillips, HongYu Zheng, Siu Chung Tam, Wen Qing Liu, Gongling Wen, Zhiben Gong, Yee Loy Lam

Proceedings Volume 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V; (2000) https://doi.org/10.1117/12.387591
Event: Symposium on High-Power Lasers and Applications, 2000, San Jose, CA, United States

Abstract

Many reviews about the interconnection line fabrication by laser processing method were reported recently. UV laser process polyimide has been studied thoroughly during the past decade. In this report, we discussed the utilization of surface potential changing on polyimide film irradiated by excimer KrF laser and metallized the UV laser treated polyimide surface by electroless copper deposition. A new negatively charged polymer stabilized Pd solution was applied as catalyst in this experiment. We also produced pattern-wised fine line on KrF laser induced PI surface using this method.

Citation Download Citation

Gang Zhao, Harvey M. Phillips, HongYu Zheng, Siu Chung Tam, Wen Qing Liu, Gongling Wen, Zhiben Gong, and Yee Loy Lam "Selectively deposited copper on laser-treated polyimide using electroless plating", Proc. SPIE 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, (7 June 2000); https://doi.org/10.1117/12.387591

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