Effect of SiO2 cladding on properties of annealed proton-exchanged LiNbO3 waveguides

Yuri N. Korkishko; Vyacheslav A. Fedorov; Oksana Y. Feoktistova; Tamara V. Morozova; Evgenii M. Paderin

doi:10.1117/12.379946

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24 March 2000 Effect of SiO₂ cladding on properties of annealed proton-exchanged LiNbO₃ waveguides

Yuri N. Korkishko, Vyacheslav A. Fedorov, Oksana Y. Feoktistova, Tamara V. Morozova, Evgenii M. Paderin

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Proceedings Volume 3936, Integrated Optics Devices IV; (2000) https://doi.org/10.1117/12.379946
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

We show that SiO₂ cladding effects on optical properties of annealed proton-exchanged (APE) LiNbO₃ waveguides as well as on kinetic of annealing process. Annealing with previously deposited SiO₂ film reduces the optical losses in APE LiNbO₃ waveguides. The structural phase diagram of H_xLi_1-xNbO₃ is also modified if annealing is performed with previously deposited SiO₂ layer. The physical mechanisms, including evaporation of H₂O and/or Li₂O during annealing without deposited film and, as a result, formation of defects and lithium deficit phase is discussed.

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Yuri N. Korkishko, Vyacheslav A. Fedorov, Oksana Y. Feoktistova, Tamara V. Morozova, and Evgenii M. Paderin "Effect of SiO₂ cladding on properties of annealed proton-exchanged LiNbO₃ waveguides", Proc. SPIE 3936, Integrated Optics Devices IV, (24 March 2000); https://doi.org/10.1117/12.379946

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