High-performance polyimide waveguide array with micromirror coupler for guided-wave optoelectronic interconnects

Yujie Liu; Lei Lin; Chulchae Choi; Ray T. Chen

doi:10.1117/12.382164

19 April 2000 High-performance polyimide waveguide array with micromirror coupler for guided-wave optoelectronic interconnects

Yujie Liu, Lei Lin, Chulchae Choi, Ray T. Chen

Author Affiliations +

Proceedings Volume 3950, Optoelectronic Integrated Circuits IV; (2000) https://doi.org/10.1117/12.382164
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

We report the formation of high-performance polyimide waveguide arrays with 45 degree(s) micro mirror coupler fabricated at each end, which provides a high-efficiency output or input surface-normal light couple for the waveguide. This fully embedded integration provides an efficient method of optical interconnection for the board-level data communication and the multi-layer connection. We employed the Si CMOS process compatible polyimide as the fabrication material, which is relatively easy to process and has low propagation loss for light at 850 nm wavelength. A 1 X 12 waveguide array with 45 degree(s) micro mirror coupler fabricated at each end is experimentally demonstrated.

Citation Download Citation

Yujie Liu, Lei Lin, Chulchae Choi, and Ray T. Chen "High-performance polyimide waveguide array with micromirror coupler for guided-wave optoelectronic interconnects", Proc. SPIE 3950, Optoelectronic Integrated Circuits IV, (19 April 2000); https://doi.org/10.1117/12.382164

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