Fabrication and testing of polyimide thermo-optic switches

John Martin Taboada; Dechang An; Zan Shi; Jeffery J. Maki; Suning Tang; Ray T. Chen

doi:10.1117/12.384402

27 April 2000 Fabrication and testing of polyimide thermo-optic switches

John Martin Taboada, Dechang An, Zan Shi, Jeffery J. Maki, Suning Tang, Ray T. Chen

Proceedings Volume 3952, Optoelectronic Interconnects VII; Photonics Packaging and Integration II; (2000) https://doi.org/10.1117/12.384402
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

CMOS compatible optical polyimide based thermo-optic switches have the potential use as low-power switches. These switches would have many advantages over other switches based on inorganic crystals. For one, they can be integrated into module-to-module systems using currently available VLSI fabrication techniques. Polyimide based, 1 by 2 thermo-optic switches are fabricated onto silicon wafers and tested. We report the properties and characteristics of digital thermo- optic switches designed to operate at 1.3 micrometers . Also, the switching characteristics at different heating electrode voltages are tested and compared.

Citation Download Citation

John Martin Taboada, Dechang An, Zan Shi, Jeffery J. Maki, Suning Tang, and Ray T. Chen "Fabrication and testing of polyimide thermo-optic switches", Proc. SPIE 3952, Optoelectronic Interconnects VII; Photonics Packaging and Integration II, (27 April 2000); https://doi.org/10.1117/12.384402

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