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27 April 2000 Novel guided-wave thermo-optic beam deflector
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Proceedings Volume 3952, Optoelectronic Interconnects VII; Photonics Packaging and Integration II; (2000)
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States
A novel approach for laser beam deflection using the thermal optic prism array in a polymeric planar waveguide is developed. This approach is based on the different thermo- optic properties between polymer and silica, the two optical materials employed for the guided wave beam deflector. A waveguide structure with the core layer composed of inversely positioned polymer and silica triangles forming a polymer/silica prism array has been fabricated. Through electrical heating, a temperature change results in an index difference between the two optical materials and creates an optical prism structure in the polymer/silica planar waveguide. A beam deflection of 5.4 degree was observed under a temperature change of 60 degrees C in the fabricated prism array. The sensitivity of the device is 0.09 degrees/degrees C. A maximal number of resolvable spots of 8 was achieved at a low driving power from the thermo-optic prism array structure. The accuracy of beam deflection approaches 16 micro-radian. The device fabricated has a thickness of 5 microns, a prism aperture width of 600 microns, and a device length of 7 mm. Optimal design to maximize the deflection angle and the number of resolvable spots has been evaluated.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bulang Li, Suning Tang, Xinghua Han, Jeffery J. Maki, Chiou-Hung Jang, Dechang An, Jin-ha Kim, Lin Sun, John Toboada, and Ray T. Chen "Novel guided-wave thermo-optic beam deflector", Proc. SPIE 3952, Optoelectronic Interconnects VII; Photonics Packaging and Integration II, (27 April 2000);

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