Fabrication of electroactive polymer actuator composed of polypyrrole and solid-polymer electrolyte and its application to micropump

Seung-Ki Lee; Young Choi; WooYoung Sim; Sang Sik Yang; HoJung An; James Jungho Pak

doi:10.1117/12.387787

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7 June 2000 Fabrication of electroactive polymer actuator composed of polypyrrole and solid-polymer electrolyte and its application to micropump

Seung-Ki Lee, Young Choi, WooYoung Sim, Sang Sik Yang, HoJung An, James Jungho Pak

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Proceedings Volume 3987, Smart Structures and Materials 2000: Electroactive Polymer Actuators and Devices (EAPAD); (2000) https://doi.org/10.1117/12.387787
Event: SPIE's 7th Annual International Symposium on Smart Structures and Materials, 2000, Newport Beach, CA, United States

Abstract

Mechanical performances of beam-shaped and bridge-shaped conductive polymer actuator in aqueous solution and in solid electrolyte have been measured and analyzed varying polymerization conditions and operating conditions. The optimum thickness of polypyrrole for the best bending performance is about 17-19 μm which has been polymerized at the current density of 5.4 μA/mm² for 120 minutes. For the application of conductive polymer actuator to micropump, silicon bulk micromachining process has been combined with polymer processes. By use of parylene diaphragm and anisotropic etching of silicon, the micropump structure composed of polypyrrole and solid polymer electrolyte has been fabricated successfully.

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Seung-Ki Lee, Young Choi, WooYoung Sim, Sang Sik Yang, HoJung An, and James Jungho Pak "Fabrication of electroactive polymer actuator composed of polypyrrole and solid-polymer electrolyte and its application to micropump", Proc. SPIE 3987, Smart Structures and Materials 2000: Electroactive Polymer Actuators and Devices (EAPAD), (7 June 2000); https://doi.org/10.1117/12.387787

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