Layout postprocessing in ion projection lithography (IPL)

Hans Hartmann; Alex Petraschenko; Stefan Schunk; Richard Steinmetz; Ernst Haugeneder; Hans Loeschner

doi:10.1117/12.377097

3 February 2000 Layout postprocessing in ion projection lithography (IPL)

Hans Hartmann, Alex Petraschenko, Stefan Schunk, Richard Steinmetz, Ernst Haugeneder, Hans Loeschner

Proceedings Volume 3996, 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents; (2000) https://doi.org/10.1117/12.377097
Event: 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 1999, Munich, Germany

Abstract

Several post-optical lithography technologies are under development. Ion proj ecti on lithography (IPL) is one choice. For the industrial usage of the ion projection lithography a powerful software tool for layout post processing is necessary to achieve the required (TI) uniformity and pattern fidelity. The application of stencil masks in the IPL exposure step requires the concept of complementary masks. The IPL software has to provide the mask pattern split and the complementary mask layout as well as a mask pattern pre-distortion in order to compensate ion optical and membrane stress induced pattern distortions. The IPL specific pattern transfer process shows fig. I. The goal of this figure is to achieve a correspondence between chip layout on design level and wafer layout.

Citation Download Citation

Hans Hartmann, Alex Petraschenko, Stefan Schunk, Richard Steinmetz, Ernst Haugeneder, and Hans Loeschner "Layout postprocessing in ion projection lithography (IPL)", Proc. SPIE 3996, 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents, (3 February 2000); https://doi.org/10.1117/12.377097

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available