EUV holographic aerial image recording

Sang Hun Lee; Patrick P. Naulleau; Kenneth A. Goldberg; Chang Hyun Cho; Jeffrey Bokor

doi:10.1117/12.390125

21 July 2000 EUV holographic aerial image recording

Sang Hun Lee, Patrick P. Naulleau, Kenneth A. Goldberg, Chang Hyun Cho, Jeffrey Bokor

Proceedings Volume 3997, Emerging Lithographic Technologies IV; (2000) https://doi.org/10.1117/12.390125
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

One-hundred-nm-resolution holographic aerial image monitoring based on lensless Fourier-transform holography at EUV wavelengths using a synchrotron-based source is described. This method can be used to monitor the coherent imaging performance of EUV lithographic optical systems. The system has been implemented in the EUV phase-shifting point diffraction interferometer (PS/PDI) at Lawrence Berkeley National Lab. Here we introduce the idea of the holographic aerial image recording technique and present imaging performance characterization results of an EUV 10x-reduction Schwarzschild objective.

Citation Download Citation

Sang Hun Lee, Patrick P. Naulleau, Kenneth A. Goldberg, Chang Hyun Cho, and Jeffrey Bokor "EUV holographic aerial image recording", Proc. SPIE 3997, Emerging Lithographic Technologies IV, (21 July 2000); https://doi.org/10.1117/12.390125

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