Power scaling of a Z-pinch extreme ultraviolet source

Malcolm W. McGeoch

doi:10.1117/12.390043

21 July 2000 Power scaling of a Z-pinch extreme ultraviolet source

Malcolm W. McGeoch

Proceedings Volume 3997, Emerging Lithographic Technologies IV; (2000) https://doi.org/10.1117/12.390043
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

A xenon Z-pinch generating extreme ultraviolet radiation at the Mo-Si mirror wavelength of 13.5 nm has been scaled to emit increased power at a higher repetition frequency. The 25 mm long by 3.0 mm (FWHM) diameter pinch produces 1.5 W of EUV radiation (2.5% bandwidth) into an axial 0.1 sr solid angle when operated at 100 Hz (100 J stored). The measured average pinch liner heat load at 100 Hz is 37 W cm^-2, corresponding to an average internal wall temperature of 80 degrees Celsius. Electrode and liner erosion is very slight after more than 10⁶ pulses at 100 Hz. Source cleanliness was demonstrated via a two-mirror simulation of a condenser in which throughput was unchanged during a 10⁶ pulse run at 50 Hz. Amplitude stability was 12% (3(sigma) ) and positional stability was less than 4% of source diameter (1(sigma) ). 13.5 nm output scaled linearly with repetition frequency to more than 150 Hz (58 J stored). The cost of ownership for this source is estimated to be no greater than for an excimer laser illuminator. A plan is outlined for continued development to > 1 kHz and usable power of 16 W.

Citation Download Citation

Malcolm W. McGeoch "Power scaling of a Z-pinch extreme ultraviolet source", Proc. SPIE 3997, Emerging Lithographic Technologies IV, (21 July 2000); https://doi.org/10.1117/12.390043

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