Advanced materials for 193-nm resists

Tohru Ushirogouchi; Koji Asakawa; Naomi Shida; Takeshi Okino; Satoshi Saito; Yoshinori Funaki; Akira Takaragi; Kentaro Tsutsumi; Tatsuya Nakano

doi:10.1117/12.388279

23 June 2000 Advanced materials for 193-nm resists

Tohru Ushirogouchi, Koji Asakawa, Naomi Shida, Takeshi Okino, Satoshi Saito, Yoshinori Funaki, Akira Takaragi, Kentaro Tsutsumi, Tatsuya Nakano

Author Affiliations +

Proceedings Volume 3999, Advances in Resist Technology and Processing XVII; (2000) https://doi.org/10.1117/12.388279
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

Acrylate monomers containing alicyclic side chains featuring a series of polar substituent groups were assumed to be model compounds. Solubility parameters were calculated for the corresponding acrylate polymers. These acrylate monomers were synthesized using a novel aerobic oxidation reaction employing N-hydroxyphtalimide (NHPI) as a catalyst, and then polymerized. These reactions were confirmed to be applicable for the mass-production of those compounds. The calculation results agreed with the hydrophilic parameters measured experimentally. Moreover, the relationship between the resist performance and the above-mentioned solubility parameter has been studied. As a result, a correlation between the resist performance and the calculated solubility parameter was observed. Finally, resolution of 0.13-micron patterns, based on the 1G DRAM design rule, could be successfully fabricated by optimizing the solubility parameter and the resist composition.

Citation Download Citation

Tohru Ushirogouchi, Koji Asakawa, Naomi Shida, Takeshi Okino, Satoshi Saito, Yoshinori Funaki, Akira Takaragi, Kentaro Tsutsumi, and Tatsuya Nakano "Advanced materials for 193-nm resists", Proc. SPIE 3999, Advances in Resist Technology and Processing XVII, (23 June 2000); https://doi.org/10.1117/12.388279

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available