Production Of Antireflective Coatings By Ion Implantation

Paolo Mazzoldi

doi:10.1117/12.935484

18 September 1983 Production Of Antireflective Coatings By Ion Implantation

Paolo Mazzoldi

Proceedings Volume 0400, New Optical Materials; (1983) https://doi.org/10.1117/12.935484
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland

Abstract

In this paper a systematic investigation on the optical behaviour of 40-100 keV Ar implant ed alkali glasses will be discussed. The implantation of soda-lime glasses resulted in a surface layer formation which presents a decreased refractive index. The thickness and average refractive index of such layer have been evaluated from the position and height of the interferential minima, observed in the reflectance curves. The significative antireflective improvement of the implanted glass has been connected to a surface alkali depletion, due to a preferential sputtering and an enhanced diffusion over the implanted ion range.

Citation Download Citation

Paolo Mazzoldi "Production Of Antireflective Coatings By Ion Implantation", Proc. SPIE 0400, New Optical Materials, (18 September 1983); https://doi.org/10.1117/12.935484

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available