Analysis of OPC features in binary masks at 193 nm

Konstantinos Adam; Andrew R. Neureuther

doi:10.1117/12.389064

5 July 2000 Analysis of OPC features in binary masks at 193 nm

Proceedings Volume 4000, Optical Microlithography XIII; (2000) https://doi.org/10.1117/12.389064
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

The effectiveness of OPC features in binary masks is characterized using rigorous 3D electromagnetic simulation and linking of the transmitted fields to SPLAT for the aerial image calculation. Scatter bars (SB) and OPC serifs are treated separately. At 193nm illumination wavelength the correction in the aerial image CD at best focus and at out- of-focus locations of 130nm isolated lines is examined in the presence of a single pair of scatter bars. The LES_aerial of the aerial image is found, when placing square OPC features near the corners of the line. Data is provided on the dependence between the size and placement of the OPC scatter bars or serifs and the magnitude of the CD_aerial and LES_aerial corrections, and general rules of thumb regarding their design process are given. The necessity of rigorous 3D electromagnetic simulations as compared to simulations using a thin mask approximation is also assessed in each case and found to be of limited concern for binary masks.

Citation Download Citation

Konstantinos Adam and Andrew R. Neureuther "Analysis of OPC features in binary masks at 193 nm", Proc. SPIE 4000, Optical Microlithography XIII, (5 July 2000); https://doi.org/10.1117/12.389064

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available