Comparison between 2-phase-shifting mask and 3-phase-shifting mask on application of printing low-duty-ratio contact array patterning

Kuei-Chun Hung; Benjamin Szu-Min Lin; Hsien-an Chang; Alex Tseng; Lien-Sheng Chung; WeiJyh Liu; Der-Yuan Wu; Peter Huang

doi:10.1117/12.388974

5 July 2000 Comparison between 2-phase-shifting mask and 3-phase-shifting mask on application of printing low-duty-ratio contact array patterning

Kuei-Chun Hung, Benjamin Szu-Min Lin, Hsien-an Chang, Alex Tseng, Lien-Sheng Chung, WeiJyh Liu, Der-Yuan Wu, Peter Huang

Author Affiliations +

Proceedings Volume 4000, Optical Microlithography XIII; (2000) https://doi.org/10.1117/12.388974
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

In this study, 2PSM and 3PSM are implemented to print low- duty-ratio self-aligned contact plugs. The simulation and experimental results demonstrate that 2PSM has larger process windows than 3PSM. One of the advantages of 2PSM is no asymmetric defocus effect, which is caused by the phase difference of 3PSM and reduces the process window of 3PSM. Defocus-dependent shape distortion in the case of 3PSM is not found in the case of 2PSM, either. Different illumination conditions have been investigated to determine the best illumination condition for 2PSM in terms of large common process window besides less x-y distortion. Optimum illumination parameters and suitable scattering bars can minimize pattern distortion.

Citation Download Citation

Kuei-Chun Hung, Benjamin Szu-Min Lin, Hsien-an Chang, Alex Tseng, Lien-Sheng Chung, WeiJyh Liu, Der-Yuan Wu, and Peter Huang "Comparison between 2-phase-shifting mask and 3-phase-shifting mask on application of printing low-duty-ratio contact array patterning", Proc. SPIE 4000, Optical Microlithography XIII, (5 July 2000); https://doi.org/10.1117/12.388974

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE