VUV transmittance of fused silica glass influenced by thermal disorder

Noriaki Shimodaira; Kazuya Saito; Akira J. Ikushima; Toru Kamihori; Shuhei Yoshizawa

doi:10.1117/12.388996

5 July 2000 VUV transmittance of fused silica glass influenced by thermal disorder

Noriaki Shimodaira, Kazuya Saito, Akira J. Ikushima, Toru Kamihori, Shuhei Yoshizawa

Proceedings Volume 4000, Optical Microlithography XIII; (2000) https://doi.org/10.1117/12.388996
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

The technological development of projection photolithography at the 157 nm wavelength of the F₂ laser followed by the 193 nm of the ArF excimer laser has been progressing rapidly. Fused silica glass is most promising candidate for 157 nm photomasks, while its absorption edge is extremely close to 157 nm. In this paper the vacuum,-UV transmittance curve at temperatures of 298 to 498 K was examined. The curve gradually shift to longer wavelengths due to thermal disorder and the transmittance at 157nm decreased with increasing temperature. The rise in temperature induced by F₂ laser energy density and the irradiation time. For examples, in the case of 0.9 internal transmittance and a fluence of 0.1 mJ/cm(superscript 2/pulse with 1 kHz frequency, the temperature raised by about 8K. The change of transmittance at 157 nm accompanying the increment of 8K is negligibly small. The data suggests that the transmission loss caused by thermal disorder during F₂ laser irradiation can be neglected as long as the silica glass with high internal transmittance is used in 157 nm photomasks.

Citation Download Citation

Noriaki Shimodaira, Kazuya Saito, Akira J. Ikushima, Toru Kamihori, and Shuhei Yoshizawa "VUV transmittance of fused silica glass influenced by thermal disorder", Proc. SPIE 4000, Optical Microlithography XIII, (5 July 2000); https://doi.org/10.1117/12.388996

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available