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28 November 1983 One Dimensional Linear Refractive Index Profiles From Angular Reflectivity Measurements At One Wavelength
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Proceedings Volume 0401, Thin Film Technologies I; (1983) https://doi.org/10.1117/12.935519
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland
Abstract
A technique has been developed to determine one-dimensional linear refractive index profiles for planar thin films from angular reflectivity measurements at one wavelength. The technique uses a nonlinear least-squares fitting algorithm, together with a multilayer characteristic matrix model. The fitting error is examined as a function of adjustable parameters using a three-dimensional graphing routine. From synthetic data it is demonstrated that, within the domain of chosen adjustable parameters and realistic experimental uncertainties, a best linear profile fit can be obtained. The technique is demonstrated using reflectance data on laboratory samples of In203:Sn.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. N. Grimbergen and R. B. Goldner "One Dimensional Linear Refractive Index Profiles From Angular Reflectivity Measurements At One Wavelength", Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); https://doi.org/10.1117/12.935519
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