Paper
29 December 1999 Holographic transmission surface-relief grating couplers for backplane interconnections
Miroslav Miler, Ivo Aubrecht, Ivo Koudela
Author Affiliations +
Proceedings Volume 4016, Photonics, Devices, and Systems; (1999) https://doi.org/10.1117/12.373631
Event: Photonics Prague '99, 1999, Prague, Czech Republic
Abstract
Holographic surface-relief diffractive elements with an inclined profile working as transmission grating couplers for backplane interconnects were fabricated and their diffraction efficiency was measured during a step-by-step development process for various orientations with respect to the direction of incident light. The highest diffraction efficiency was achieved for p-polarized light which propagates inside a medium of lower optical density and is outcoupled into a medium of higher optical density.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Miroslav Miler, Ivo Aubrecht, and Ivo Koudela "Holographic transmission surface-relief grating couplers for backplane interconnections", Proc. SPIE 4016, Photonics, Devices, and Systems, (29 December 1999); https://doi.org/10.1117/12.373631
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KEYWORDS
Diffraction gratings

Diffraction

Holography

Absorbance

Beam propagation method

Refraction

Photoresist materials

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