Analysis of electromechanical parameters of electrostatic microrelay with a movable elastic cantilever electrode

Georgy I. Efremov; Nikolay Ivanovich Mukhurov; A. V. Galdetskiy

doi:10.1117/12.382309

10 April 2000 Analysis of electromechanical parameters of electrostatic microrelay with a movable elastic cantilever electrode

Georgy I. Efremov, Nikolay Ivanovich Mukhurov, A. V. Galdetskiy

Author Affiliations +

Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382309
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France

Abstract

Literature provides a sufficient body of information on developments of electrostatic micro relays (EMR) with movable electrode (ME) in the form of a spring cantilever beam. However, little attention has been given to obvious close relationship between required characteristics and the corresponding design solutions of EMR components, which hinders the development of relay constructions optimal for specific working conditions. This paper presents a method for determining values and interrelations of electric and mechanical parameters of EMR's promising for certain applications. Schematically, the EMR consists of a rigid dielectric substrate 1 having a salient part 2 covered with a deposited stationary thin-film electrode (SE) 3 and spring plate 4 upon which a cantilever ME 5 is placed in the area hanging over the salient pat. Contacts 6 of control circuit are located at the electrode ends.

Citation Download Citation

Georgy I. Efremov, Nikolay Ivanovich Mukhurov, and A. V. Galdetskiy "Analysis of electromechanical parameters of electrostatic microrelay with a movable elastic cantilever electrode", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382309

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