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10 April 2000 Anodic oxidation in polysilicon microactuators
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Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382327
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France
Abstract
Many polysilicon devices, like comb-drives, micromotors, valves, accelerometers, micromirrors or microshutters use electrostatic forces for their actuation. Electrostatic forces increases with the square of the inverse of the distance between electrodes. Due to this favorable scaling law, electrostatic actuation is interesting for microsystems.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pierre Voumard, Patrick Debergh, G. Perregaux, and S. Gonseth "Anodic oxidation in polysilicon microactuators", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382327
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