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10 April 2000 Automated generation of compact models for fluidic microsystems
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Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000)
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France
Simulation and design of microfluidic systems requires various level models: high-fidelity models for design and optimization of particular elements and devices as well as system-level models allowing for VLSI-scale simulation of such systems. For the latter purpose, reduced or compact models are necessary to make such system simulations computationally feasible. In this paper, we present a design methodology and practical approach for generation of compact models of microfluidic elements. In this procedure we use high-fidelity 3D simulations of the microfluidic devices to extract their characteristics for compact models, and subsequently, to validate the compact model behavior in various regimes of operation. The compact models are generated automatically in the formats that can be directly used in SPICE or SABER. As an example of a nonlinear fluidic device, the generation of compact model for 'Tesla valve' is described in detail. Tesla valve is one of the no-moving- parts valves used in micropumps in MEMS. Its principle of operation is based on the rectification of the fluid, so it may be considered as a 'fluidic diode'.
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Marek Turowski, Zhijian Chen, and Andrzej J. Przekwas "Automated generation of compact models for fluidic microsystems", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000);

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